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Pyroelectric infra-red detectors have been of-interest for many years because of their wide wavelength response, good sensitivity and lack of need for cooling. Arrays of such detectors, comprising a pyroelectric material interfaced to an application specific integrated circuit for signal amplification and read out, provide an attractive solution to the problem of collecting spatial information on the IR distribution in a scene. Sol gel deposition provides an excellent technique for the growth of ferroelectric thin films and Mn-doped PZT30/70 films can be grown at 560°C with FD = 3.85 × 10-5 Pa-1/2. A new concept is presented here: the use of arrays of thin film pyroelectric detector elements with integrated radiation collectors designed to enhance the intensity of the radiation falling on the element. Two collector designs are presente...

Abstract Work is being undertaken to produce an uncooled pyroelectric infra-red detector array which incorporates within its structure, an array of radiation collectors made by the bulk micro-machining of silicon. Development aspects of the processing route are presented here.