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It is the focus of this project to explore the possibility of achieving Radio Fre¬quency (RF) micro-devices on flexible polymer substrates. To this end standard MEMS fabrication methods have been tailored to allow the integration of func¬tional materials and device patterning for production of RF MEMS devices with flexible organic substrates. Material quality, device yield, performance and re-liability are critical aspects of our study. The project encompasses the use of a direct integration method for the creation of Film Bulk Acoustic Resonators (FBARs) on Liquid Crystal Polymer (LCP) substrates. An FBAR is a passive component used for resonance and filtering purposes. Its production on organic substrates would lead to a number of ad-vantages including: overall cost savings, size reduction and ability of the device to be directly int...
This work focuses on the development of a method for probing the mechani- cal response of thin film materials based on miniature tensile testing. A number of mechanisms that may compromise the performance and potentially limit the operational lifetime of MEMS devices which incorporate functional ferroelectric ceramics were also identified and investigated. Reliability of piezo MEMS com- ponents was studied at a wafer and at a device level through the development of appropriate techniques based on miniature tensile testing, time- resolved mi- cro RAMAN spectroscopy and laser Doppler vibrometry. Micro tensile testing was further used for the extraction of the elastic properties of various thin film materials. A miniature tensile stage was developed in common with DEBEN UK for the mechanical characterization of functional thin film materi...
Optimisation can be viewed in many ways including that which is new and improvements to the materials, or methods that are already in place. Therefore we can define the two specific areas that make up the investigation relating to this work; those pertaining to new materials which may improve performance, and an analysis of the methods, and results, with regard to adhesion of the dissimilar materials incumbent in the present structures. In this work, two candidate materials have been identified in order to improve the performance of the electrode structures present in MEMS devices used for piezoelectric applications. These are the conductive oxides, Lanthanum Nickel Oxide and Ruthenium Oxide, which have shown considerable promise because of their reported improvements in fatigue properties with PZT applications. They have been investig...
This thesis focuses on the use of high permittivity tunable dielectrics and more specifically sol-gel ferroelectric thin films for low cost, high performance tunable devices such as varactors and filters at RF and microwave frequencies. The topics covered include measurement techniques for the characterization of tunable dielectrics at low and microwave frequencies, fabrication processes, electrical and acoustic modeling of thin film ferroelectric varactors, performance optimization using conductive electrodes, realization of tunable microwave circuits and integration of tunable dielectrics with conventional bulk acoustic wave resonators (FBAR). Cont/d.
The work presented in this thesis focuses on the synthesis of nanomaterials, formulation and printing of Ag nanoparticle and nanowire inks for two distinct applications: a) inkjet printing of Ag nanoparticle films on ceramic substrates with the aim of providing a smaller size of printed feature at lower cost than that can be obtained with the conventionally used screen printing, and b) Ag nanowires films prompted by the wide quest of electronics industry for materials with increased flexibility, lower cost and higher transmittance to replace indium tin oxide. Ag nanoparticles with a size of 50 nm were successfully synthesized and dispersed in aqueous medium. Two preparation routes were compared in order to distinguish the effects of solvents treatment of particles and their influence on the suspension characteristics including Ag loadi...
The potential of algal biofuels has been technically and experimentally confirmed with laboratory- and pilot-scale studies in past literature. However, the most important factor now is to confirm that algal cultivation for biofuels and other end-products is economically feasible on the large, commercial scale. The ALGADISK project aimed to produce a novel biofilm-based photo-bioreactor with the aims of CO2 capture and making valuable products such as biofuel, economically viable. This thesis aimed to investigate and provide substrates in which algae biofilm is stimulated and increased. Polyelectrolyte (PE) coatings adsorbed onto cost-effective polymers were investigated, based on the strategy of electrostatic attraction. It was found that the algae species charge density and cell wall functional groups composition affected attachment o...
Energy harvesting; that is, harvesting small amounts of energy from environmental sources such as solar, air flow or vibrations using small-scale (≈1cm 3 ) devices, offers the prospect of powering portable electronic devices such as GPS receivers and mobile phones, and sensing devices used in remote applications: wireless sensor nodes, without the use of batteries. Numerous studies have shown that power densities of energy harvesting devices can be hundreds of µW; however the literature also reveals that power requirements of many electronic devices are in the mW range. Therefore, a key challenge for the successful deployment of energy harvesting technology remains, in many cases, the provision of adequate power. This thesis aims to address this challenge by investigating two methods of enhancing the power output of a piezoelectric-bas...
Patch clamping is considered the gold standard in measuring the bioelectrical activity of a cell. It is used to detect and measure ion transport through ion channels located throughout a cell membrane. Ion movement is crucial to cell viability and cell-to-cell communication. Pharmaceutical companies increasingly target ion channels because of their significance in disease and to help design better targeted drugs. However, the traditional method of patch clamping is cumbersome and is being replaced by planar high throughput screening (HTS) systems. These systems are reaching their limits due to materials and cost of processing; cell handling methods and small varieties of applicable cell types are also issues to be addressed. In this work, the core components of a new kind of planar patch clamping device have been designed and developed...
Ferroelectric perovskite thin films for voltage tunable applications, namely (Ba,Sr)TiO3 (Barium Strontium Titanate or BST) and (Pb,Sr)TiO3 (Lead Strontium Titanate or PST), are synthesized via the so-called sol-gel route. While BST shows the tendency to severe film cracking, PST can be grown crack free onto platinised Si standard substrates and even directly onto SiO2, SiNx or bare Si. The growth kinetics of PST on platinised SiO2/Si and directly on SiO2/Si are studied in detail using X-ray diffractometry (XRD), scanning electron and atomic force microscopy, SEM and AFM respectively. It is shown that PST begins to crystallise at 500°C on Ti/Pt and 550°C directly on SiO2. After a thermal treatment of 650°C for 15 min both films are fully crystallised with random (100) and (110) orientation and a smooth surface. The dielectric propertie...
This PhD project aims to develop lead-free thin-film dielectric materials for fixed value, voltage tunable and high-k zipping variable capacitors using growth techniques that can be scaled for silicon batch fabrication. The thesis specifically details the growth and characterisation of barium zirconate titanate (BZT) and bismuth zinc niobate (BZN) dielectric thin films. Fixed value and tunable capacitors have been realised through the use of low and high permittivity dielectric thin film materials in both the amorphous and crystalline states. Planar devices fabricated using BZT and BZN dielectric thin films were grown by sol-gel and RF magnetron sputtering, respectively. The effects of different bottom electrodes were also investigated. Capacitors in a metal-insulator-metal (MIM) [metal-ferroelectric-metal (MFM) for BZT] structure have...